A compact XYZ precIsion scanning stage is designed in this paper, which is assembled by a XY and a Z precision positioning stages. Each stage is driven by piezoelectric actuator, and guided by symmetric parallel flexible hinges, respectively. These parallel flexible hinges are arranged symmetrically to reduce cross-coupling among X-, Y - and Z-axis. In addition, the theoretical stiffness modeling of the scanner was carried out. According to an effective strain energy method, the stiffness model are obtained, which provides a useful tool to calculate the stiffness of scanner. Furthermore, the characteristics of the XYZ scanner are evaluated in this paper by finite element analysis simulation. The simulation results show that the cross-axis coupling ratio of the proposed scanner is less than 0.91%, indicating excellent decoupling performances. Meanwhile, and the dynamic characteristics are investigated and the results are shown that the design scanner provides the large dynamic bandwidth.
Kunhai Cai;Yanling Tian;Liangyu Cui;Zhen Yang;Dawei Zhang.
MARSS(2016)