Micro-assembling Teˉon/Si3N4 multilayer ?lm was developed by ion beam alternating sputtering Teˉon and Si3N4 ceramic targets. The?structural, mechanical and microtribological properties were studied by PHI-5300, FTIR, XRD and atomic force and friction force microscope(AFM/FFM). The results show that the multilayer consists of Si3N4 component and crystalline Teˉon. The hardness of the multilayer is ?less than that of Si3N4; but the toughness of Teˉon/Si3N4 is greatly improved. The friction coef?cient of Teˉon/Si3N4 multilayer is lower thanthat of Si3N4 ?lm, and the wear resistance of Teˉon/Si3N4 multilayer is much greater than that of Teˉon ?lm. The friction force of Teˉon/Si3N4 ?lm is linear with the load in nanoscale. The worn track will be formed in Teˉon and Teˉon/Si3N4 ?lm when the load is greater than 70?nN. q1999 Published by Elsevier Science Ltd. All rights reserved.
Jihui Wang,Xinchun Lu,Shizhu Wen,Hengde Li,Liduo Wang.
Thin Solid Films,342,291-296(1999)