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In thiswork,Fe-dopedZnOthinfilmswerepreparedbysol–gelmethodonSiandglasssubstratesand?influenceofFe-dopingconcentrationonthestructuralandopticalpropertiesofthefilmswasstudied.?The?Xraydiffraction(XRD)analysesshowthatalltheZnOthinfilmspreparedinthisworkhavea?hexagonalwurtzitestructureandarepreferentiallyorientedalongthe c-axis perpendiculartothe?substratesurface.After1at%Feisdoped,thecrystallinequalityandthepreferentialorientationofZnO?thin filmareimproved.However,whenFe-dopingconcentrationisabove1at%,thecrystallinequality?and?the preferentialorientationofZnOthinfilmisweakenedinturn.Thesurfacemorphologyanalyses?of?thesamplesshowthattheZnOgrainsizestendtodecreasewiththeincreaseofFedoping?concentration.Fe?incorporationhardlyinfluencesthetransmittanceinthevisiblerange,buttheoptical?band-gapsofZnOthinfilmsgraduallyincreasewiththeimprovedFe-dopingconcentration.The
photoluminescencespectradisplaythatallthesampleshaveanultravioletemissionpeakcenteredat?381 nmandthe1at%Fe-dopedZnOthinfilmhasthestrongestultravioletemissionpeak.Theabove?results suggestthat1at%Fe-incorporationcanimprovethecrystallinequalityandenhancethe?ultravioletemissionofZnOthinfilm.