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Hard and superlight thin films laminated with boron carbide have been proposed as?candidates for strategic use such as armor materials in military and space applications. We prepared?Al-Mg-B films by sputter deposition on Si (100) substrates with one AlMgB14 target. The films?were characterized by X-ray diffraction, atomic force microscope, GD-OES spectroscopy. The?results show that films of AlMgB with different compositions have been deposited by changing the
target power and deposition temperature.The influences of substrate temperature and sputtering?power on the quality of the films are discussed.

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作者

Wen Liu,Qing Sen Meng,Yang Miao,Feng Hua Chen,Li Fang Hu

期刊

Advanced Materials Research

年份