Environmental Detect and Control SPM
| |
Temperature and humidity Sensors are embedded in CSPM5500 system,
monitor by LED.
|
|
| ? |
? |
? |
? |
? |
| |
|
?
|
Temperature
|
Humidity
|
|
Range
|
-55～150℃
|
0～100％RH
|
|
Resolution
|
0.01℃
|
0.03％RH
|
|
Accuracy
|
0.1℃
|
0.5％RH
|
|
Response time
|
5000ms
|
4000ms
|
|
Non-linearity
|
±0.18℃
|
＜1％RH
|
|
Long-time stability
|
±0.08℃
|
＜1％RH
|
|
|
 |
|
| |
|
|
| |
Seal-air System can be employed to CSPM5500 for Environmental Control SPM.
|
|
| ? |
? |
? |
? |
? |
| ? |
|
? |
? |
? |
| |
Quartz glass window
|
|
|
|
??Specifications:
??* alloy seal cab for disturbance isolation
??* acrylonitrile-butadiene O-ring for better seal
??* Large Quartz glass window for sample board-band ray radiation
??* Adjustable lightening device inside for processing monitor
??* Air inlet-outlet port for environmental control
| ? |
? |
? |
? |
? |
| ? |
|
? |
? |
? |
| |
Environmental Control SPM
|
|
|
|
| |
Sample-heating-stage System can be employed to CSPM5500 for sample temperature Control.
|
|
|
? |
|
|
 |
|
|
| |
|
|
|
| |
|
Diameter
|
30mm
|
|
Power
|
6W (Max.)
|
|
Temperature
|
150℃ (Max.)
|
|
Accuracy
|
0.5℃
|
|
| ? |
? |
? |
? |
? |
| ? |
|
? |
? |
? |
| |
Sample-heating-stage System
|
|
