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As an important component of Atomic Force Microscopes (AFM), a?piezo-scanner exhibits some undesired nonlinear characteristics, among which?the inherent hysteresis largely decreases positioning accuracy during scanning?and nano-manipulation process. To alleviate this problem, an image-based?approach is proposed in this paper to model and then compensate for the?hysteresis behavior of the piezo-scanner. Specifically, some scanning images?over standard samples are utilized to identify the parameters of the classical?Preisach model (CPM) of hysteresis. On the basis of the obtained model, an?inversion-based technique is adopted to design a compensator for the hysteresis?of the piezo-scanner. The proposed algorithm presents such advantages as?low cost and little complexity since no nanoscale position sensor is required?to collect identification data. Some scanning and nano-imprinting results are?included to demonstrate the performance of the proposed strategy.