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We report crack-free and single-crystalline wurtzite GaN heteroepitaxy layers have been grown on Si?(111) substrate by metal-organic chemical vapor deposition(MOCVD). Synthesized GaN epilayer was?characterized by X-ray diffraction(XRD), atomic force microscope (AFM) and Raman spectrum. The test?results show that the GaN crystal reveals a wurtzite structure with the <0001> crystal orientation and?XRD u-scans showed a full width at half maximum (FWHM) of around 583 arcsec for GaN grown on Si?substrate with an HT-AlN buffer layer. In addition, the Raman peaks of E2?high and A1(LO) phonon mode in?GaN films have an obvious redshit comparing to bulk GaN eigen-frequency, which most likely due totensile strain in GaN layers. But the AO phonon mode of Si has a blueshit which shows that the Si
substrate suffered a compressive strain. And we report that the AlN buffer layer plays a role for releasing
the residual stress in GaN films.