Indium tin oxide (ITO) films were deposited on polyethylene terephthalate (PET) spunbonded?nonwovens using radio frequency (RF) magnetron sputtering under different conditions. Indium?tin oxide films with different thicknesses between 56 and 224 nm showed varying transmittances?in the visible and ultraviolet regions. The transmittance of the nonwoven decreased as the?thickness of the ITO film increased. The electrical properties of the material were also affected by
the sputtering conditions. Lager sputtering power led to better electrical conductivity of the?material. Higher sputtering pressure caused a decrease in electrical conductivity. The resistivity?of the films first decreased with the increase in the temperature (till 150uC), and then increased as?the temperature increased. The materials deposited with thicker ITO showed improved electrical?conductivity.
Wang,Y.Y.;Wei,Q.F.;Shao,D.F.;Cai,Y.B.;Yu,L.Y
Surface Engineering