SiOx and diamond-like carbon (DLC) coatings as the fingerprint resistance and corrosion resistance layers were deposited?by capacitively coupled plasma (CCP)-enhanced chemical vapor deposition powered by radio frequency (RF-PECVD). In here?hexamethyldisiloxane (HMDSO) as monomer for SiOx coating, C2H2 as the carbon source for DLC growth precursor, and Ar as the?dilution gas were utilized. The important factors affected fingerprint resistance was explored in detail. Besides, the corrosion?resistant test on coatings and substrates were then examined by the potentiodynamic polarization measurement and salt-spray?corrosion test, respectively. The chemical structure and composition of SiOx and DLC films were analyzed by FTIR, and the?relationship between them and anti-corrosion property was discussed. The results show that the DLC coating demonstrates a better?anti-fingerprint behavior than that of coated SiOx, especially in acidic solution environment
Lei Wenwen,Chen Qiang,Qi Fengyang,Yang Lizhen,Liu Zhongwei,Wang Zhengduo
Rare Metal Materials and Engineering