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Microforce sensors made of PT/PZT/PT thin films were designed in the micro-Newton range. The PT/PZT/PT thin films were deposited on the Pt/Ti/SiO2/Si substrate by the sol–gel process. Structure and the crystallinity of the deposited films were characterized. The sensing properties of the microforce sensors were measured in static state and in quasi-static state. The sensitivities of the microforce sensors with two different sizes were 0.004 and 0.04065mV μ N611 in the quasi-static state.Yan Cui,Hanbai Meng,Jingwang,Weijie Dong And Liding Wang